Posted in | Optics and Photonics

Overview of PI Hybrid Stage

This video shows the working mechanism of Physik Instrumente (PI)’s Hybrid Stage. PI offers a unique hybrid concept with parent position measurement and closed-loop control. Some of the key features include simultaneous control of piezo flexure drives and DC-servo/ball screw drives, repeatability in the nanometer range, millisecond settling time to nanometer precision, high consistent velocity, and high drive and holding forces at minimum energy requirements/thermal dissipation.

Hybrid stages are mainly suited for applications that require high accuracy for measuring and returning to a position, or for surface inspection and metrology for attaining a target position accurately to the nanometer.

Run Time - 0:47min

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