The DIGILEM camera family has been released by HORIBA Jobin Yvon with the new versatile LEM camera series offering a compact design and enhanced image quality for all types of samples.
The LEM camera can be mounted on any process chamber with direct top view of the wafer, and provides a real-time digital CCD image of the sample surface making spot positioning simple. Based on the interferometry technique, the camera is ideally suited to etch/deposition rate monitoring and endpoint detection.
Operating at 670 or 905 nm, the LEM camera series is available in three versions:
- Designed for OEMs and laboratory QC the LEM provides a simple analog output of signal intensity that can be treated by any external software.
- The LEM CT includes full computer control and shares the same SIGMA-P platform as all HORIBA Jobin Yvon endpoint tools. It measures in real-time etch or deposition rate, thickness variations and also detects interface. The LEM CT is the perfect tool for OEMs and process development in industrial R&D environments.
- For high volume production the LEM PR is the complete automatic version including automatic spot positioning using Cognex ® pattern recognition plus advanced communication capabilities.