Posted in | News | Laser

Laser-Based Sigma7500 Provides Productivity Substantially Higher Than E-Beam Pattern Generators

Micronic Laser Systems AB, today received an order for a Sigma7500 system from an Asian chipmaker. The system is scheduled for delivery during the current year.

”The semiconductor industry is increasing its efforts to reduce the cost of volume chip production, and Sigma has proven to be an effective solution for reducing photomask costs,” said Carl-Johan Blomberg, Micronic CFO. “We are very pleased to see that this customer has chosen Sigma following an extensive evaluation, and look forward to a continued collaboration as the system is put into production.”

The Sigma series covers an application space including both binary photomasks and phase shifting masks (PSM) at the 90nm, 65nm and 45nm technology nodes. In addition to meeting the stringent requirements for resolution and accuracy at these advanced technology nodes, the laser-based Sigma series provides productivity that is substantially higher than that of e-beam pattern generators. This lowers photomask manufacturing costs and turn-around time, thereby reducing the cost and time-to-market for ICs.

The high resolution and productivity are achieved with the system’s 248 nm excimer laser and Micronic’s proprietary spatial light modulator (SLM) technology. A massively parallel bitmap output results in short write times – only two to three hours for advanced masks – that are independent of the design density and optical proximity correction (OPC).

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type
Submit

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.