Jul 16 2007
HORIBA Jobin Yvon has extended the performance capability of the UVISEL spectroscopic phase modulated ellipsometer with the integration of the VIP, a micro spot DUV Spectroscopic reflectometer.
The combination of high precision spectroscopic ellipsometer and micro spot reflectometer measuring at the same sample location, allows characterization of features as small as 10 microns.
Applications of the UVISEL VIP include measurement of film thickness, refractive index and reflectivity of thin films and multilayer stacks with very high accuracy.
With the addition of a large area mapping stages and integrated pattern recognition software, the UVISEL VIP is able to characterize patterned materials found in semiconductor wafers, display materials, OLED structures and biosensors with thicknesses ranging from a few angstroms to several tens of microns.
The well proven DeltaPsi2 software package controls the complete instrument, and provides a simple interface for production, pilot plant and research applications.
http://www.jobinyvon.com/