Posted in | News | LEDs | Display | Semiconductors

HORIBA Jobin Yvon Unveils Spectroscopic Ellipsometer Combined with Micro Spot Reflectometer for Patterned and Multilayer Samples Characterization

HORIBA Jobin Yvon has extended the performance capability of the UVISEL spectroscopic phase modulated ellipsometer with the integration of the VIP, a micro spot DUV Spectroscopic reflectometer.

The combination of high precision spectroscopic ellipsometer and micro spot reflectometer measuring at the same sample location, allows characterization of features as small as 10 microns.

Applications of the UVISEL VIP include measurement of film thickness, refractive index and reflectivity of thin films and multilayer stacks with very high accuracy.

With the addition of a large area mapping stages and integrated pattern recognition software, the UVISEL VIP is able to characterize patterned materials found in semiconductor wafers, display materials, OLED structures and biosensors with thicknesses ranging from a few angstroms to several tens of microns.

The well proven DeltaPsi2 software package controls the complete instrument, and provides a simple interface for production, pilot plant and research applications.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.