Imperia Photoluminescence Imaging System from Nanometrics Detects Yield-Killing Defects
This video shows the functioning of Nanometrics’ Imperia photoluminescence (PL) imaging system. Using the unique optical design technology, the PL imaging system detects and classifies yield-killing defects from nuisance defects and provides the added benefit of simultaneous monitoring of PL production. It combines MOCVD reactor yield and PM schedules to minimize cassette handling time and fab space use. The Imperia can improve the amount of LEDs by providing 1,000 times data density compared to peel mapping.
Run Time – 2:08min
The Imperia Photoluminescence (PL) Imaging System from Nanometrics