The C8000-30D X-ray direct CCD camera’s structure can irradiate EUV and soft X-ray photons directly into CCD without the need for a scintillator.
Several electrons are produced in the CCD by irradiating high energy photons, providing high sensitive detection. Back illuminated CCD covers the energy range of 20 eV to 10 keV.
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- X-ray energy analysis
- EUV lithography
- X-ray spectroscopy
- X-ray microscope