A new range of pulse energy sensors from Coherent, Inc. are specifically optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm.
These Excimer Laser EnergyMax Series sensors feature high accuracy and large active area, and utilize a novel coating that delivers superior long-term damage resistance. They can perform pulse energy measurements from 50 ÂµJ to 250 mJ, and operate at repetition rates from single shot to 400 Hz. These sensors are compatible with Coherent 3sigma, FieldMaxII-TOP, FieldMaxII-P, EPM1000 and EPM2000 meters.
The Excimer Laser EnergyMax Series comprises four individual products. These are 25 mm and 50 mm diameter sensors calibrated specifically at either 193 nm or 248 nm. Onboard sensors provide automatic temperature compensation, and built-in spectral compensation enables quantitative operation at other wavelengths, as well. Both sensors accept an optional heatsink, which can be easily attached by the user to extend the maximum energy or average power range. Specifically, these heat sinks allow 25 mm Excimer Laser sensor to be used up to 18 W average power, and 50 mm sensors to be used up to 43 W average power (both at 193 nm).