ZYGO Launches Next-Generation 3D Optical Profilers with Advances in Data Acquisition, Speed, Sensitivity and Intelligent Operation

ZYGO Nexview™ NX2 Optical Profiler

Zygo Corporation’s latest generation Nexview™ NX2 and NewView™ 9000 3D optical profiling instruments precisely measure surface area topography quickly and with ease for enhanced productivity and versatility, addressing a broad range of applications.

The Nexview NX2 and NewView 9000 instruments are based on innovative and versatile non-contact optical technologies for surface metrology applications in research, precision engineering, quality control and advanced manufacturing, including: consumer electronics, automotive, semiconductor, medical, nanotechnology and materials science.

Built on the success of ZYGO’s well-established and industry-leading Nexview and NewView line of 3D optical profilers, the latest offerings deliver significant improvements in both performance and functionality. ZYGO’s unique Coherence Scanning Interferometry (CSI) technology and innovative optical techniques enable non-destructive and precise 3D surface area measurement, including step heights, roughness, film thickness, and surface form on a wide variety of sample types.

These new products bring significant advancements to the industry, delivering high-resolution imaging and data density, along with precise and fast measurements. Surfaces that were previously considered challenging for interference microscopy can now be imaged and measured with ease thanks to our expanded range of smart features, improved sensitivity and higher dynamic range. We believe these new product platforms represent the most advanced and capable instruments available today for precise and versatile 3D optical metrology.

Eric Felkel, Product Manager, Zygo Corporation

The Nexview NX2 and NewView 9000 products feature enhanced hardware and data acquisition technology for precise measurement of the most challenging surfaces, including high slopes, low reflectivity or rough surfaces, and ultra-smooth surfaces.  The integrated Mx™ system software has been upgraded to include several key features focused on usability and automated part setup.

The new software functionality ensures that measurement variability between different users is significantly decreased, maintaining our high level of measurement precision, while minimizing the level of effort and training required to operate the instrument to its fullest potential.

Eric Felkel, Product Manager, Zygo Corporation

In addition, the Nexview NX2 and NewView 9000 instruments can accommodate physically large samples and be configured simply for different fields-of-view, using the integrated discrete image zoom turret and large selection of objective lenses – from 1.0X to 100X.  Motorized staging and controls enable advanced user control and programmability for higher levels of automation and efficiency.  

Summary of main features:

  • Large format imaging sensor that yields 1.9 million data points; 2X more than previous generation
  • Improved data acquisition and speed; 1.5X faster than the previous generation
  • Higher sensitivity and dynamic range for reliable and precise metrology on challenging surfaces (e.g. high slopes, low reflectivity, rough texture)
  • Innovative and intuitive Mx™ software with “smart” features for enhanced ease-of-use, automation and productivity

To learn more about the Nexview NX2 and NewView 9000 3D Optical Profilers, visit https://www.zygo.com/?/met/profilers/

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