Zygo Corporation Introduces Verifire™ HDX Laser Interferometer with Ultrahigh-Resolution and Imaging for Precise 3D Metrology of Optical Components and Systems

Zygo Corporation is pleased to introduce the Verifire™ HDX laser interferometer system with ultra-high spatial resolution and advanced imaging for measuring surface form and transmitted wavefront of high-performance optical components and systems.

At the core of the Verifire HDX is a new optical design, which delivers improved instrument transfer function (ITF) and ultra-high spatial resolution for superior characterization of mid-spatial frequency (MSF) characteristics and high-slope surface form errors, with high precision and confidence.

Loaded with standard features, like a low-noise, high-speed, 11.6 megapixel sensor and vibration-robust acquisition technologies, the Verifire HDX system sets a new benchmark for best-in-class optical metrology, MSF characterization and process control for critical applications.

The Verifire HDX laser interferometer system represents a significant advancement in the capability of laser interferometers to precisely measure high-quality optical components and systems. Its optical system is optimized to reveal critical mid-spatial frequency details associated with modern machining processes. The new optical design and expanded resolution and imaging capabilities leverage our advanced ITF characterization capability that is setting industry standards.

Tyler Steele, Product Manager, Metrology Instruments, ZYGO

The Verifire HDX system can be configured for a wide range of applications, with available apertures from 25 mm to 800 mm, horizontal and vertical mounting configurations, and a complete line of reference optics and accessories.

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