Nanoscience Instruments has released a three-dimensional optical microscope system combined with an atomic force microscope (AFM), which includes a small Nanosurf LensAFM and advanced Zeta Instruments optical profiler. This system is specifically designed to suit various metrology applications.
The small and easy-to-use LensAFM can be installed directly over the Zeta microscope, offering full optical access via the device. It also provides a clear vision of the AFM cantilever placed on the sample. When the AFM is installed directly onto the microscope, users can rapidly switch to high-resolution AFM imaging from three-dimensional optical measurements. The AFM enhances the abilities of the Zeta microscope by offering a lateral resolution in the order of nanometer and a height resolution in the order of sub-nm, which cannot be achieved using optical methods alone.
The Zeta-20 optical profiler delivers three-dimensional imaging and metrology ability in a strong and cheap package. The Zeta-20 utilizes the in –house ZDot technology to correct surface features with tiny proportions including roughness on textured wafers. A special optical design allows users to examine transparent substrates and thin films, and a broadband, small light made from dual-LED delivers true color images. With the ability to produce multi-surface images, the Zeta-20 can measure enclosed microfluidic equipment. It can also be used to produce images of features such as high roughness, large steps, high aspect ratio, and deep channels.
The company has delivered this special package owing to its expertise in surface metrology and AFM. The AFM can deliver exceptionally high resolution and measure roughness on the thin film, while the Zeta-20 can scrutinize the surface beneath the thin film.