Veeco Introduces Latest 3D Automated Atomic Force Microscope

Veeco Instruments Inc., announced the introduction of its new InSight(TM) 3D Automated Atomic Force Microscope (AFM) Platform, the only metrology system available with the accuracy and precision required for non-destructive, high resolution three-dimensional (3D) measurements of critical 45nm and 32nm semiconductor features, with the speed to qualify as a true fab tool. Veeco's InSight 3DAFM was designed specifically to address Critical Dimension (CD), depth and chemical mechanical planarization (CMP) metrology in a production environment.

John R. Peeler, Chief Executive Officer of Veeco, commented, "With three times the throughput (30 wafers per hour) and two times the measurement accuracy and precision of our previous AFMs, Veeco's InSight represents an entirely new approach for semiconductor 3D metrology. It is the only tool on the market today providing in-line, accurate, non-destructive 3D information, to drive shorter process development and manufacturing ramp times, improve our customers' cost of ownership and decrease their manufacturing risk."

"At 45nm and below, current in-line metrology techniques are limited in their ability to measure CD," added Paul Clayton, Vice President, Veeco's Auto AFM Business Unit. "Technologies such as CD-SEM and scatterometry are precise, but not accurate enough, causing significant measurement issues. Veeco's InSight provides the lowest measurement uncertainty for CD metrology, which leads to improved process control."

Citations

Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    Veeco. (2019, March 01). Veeco Introduces Latest 3D Automated Atomic Force Microscope. AZoOptics. Retrieved on November 15, 2019 from https://www.azooptics.com/News.aspx?newsID=1225.

  • MLA

    Veeco. "Veeco Introduces Latest 3D Automated Atomic Force Microscope". AZoOptics. 15 November 2019. <https://www.azooptics.com/News.aspx?newsID=1225>.

  • Chicago

    Veeco. "Veeco Introduces Latest 3D Automated Atomic Force Microscope". AZoOptics. https://www.azooptics.com/News.aspx?newsID=1225. (accessed November 15, 2019).

  • Harvard

    Veeco. 2019. Veeco Introduces Latest 3D Automated Atomic Force Microscope. AZoOptics, viewed 15 November 2019, https://www.azooptics.com/News.aspx?newsID=1225.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Submit