At this year's Intersolar dated May 27th to 29th in Munich it's possible to see the joint solution for layer thickness measurement from the companies tec5 and VITRONIC: State-of-the-art inline spectroscopy technology for solar cell production can be found at tec5's booth.
By cooperating in this area and bringing together the core competences of the two companies, a new generation of color inspection was born – not just reflection and color measurement at coated wafers but everything from service to integration in the production line. This is what tec5 and VITRONIC are offering.
VITRONIC and tec5 have been working together since 2008 in the area of wafer inspection. As a result an inline solution for reflection and color measurement of the blue reflex coating was created. The spectroscopy technology records the physical aspects of the reflex coating. On this basis the layer thickness and the potential efficiency are calculated. Just by using fast diode array technology the inspection within production cycle is possible. Application specific software visualizes the measurement result of every wafer in real time. This data is taken using nine measuring points. The user interface shows the user not only the physical values but also the particular color values and the associated layer thickness. Thereby the wafers can be effortlessly sorted by color. All measurement results are saved and allow the tracking of every wafer.
The data can also be used for statistical analyses. In addition to the complete integration into the system controller, an SEGS/GEM compliant transmission of all measurement data is ensured.