M-Com Selects Veeco MOCVD Tool for Production of High-Efficiency Solar Cells

Veeco Instruments Inc., announced today that Millenium Communication Co. Ltd. (M-Com) of Hsinchu, Taiwan has ordered a TurboDisc(R) E450(TM) arsenic phosphide (As/P) Metal Organic Chemical Vapor Deposition (MOCVD) System for production of high-efficiency III-V compound multi-junction solar cells.

Lih-Wen Laih, Ph.D., General Manager of M-Com, said, "Our decision to add Veeco's E450 System to our fab was based on the tool's high throughput and ability to produce exceptional high quality films, which we believe will translate into higher efficiency multi-junction solar cells. We expect that adding this tool into production will help us to reduce our cost per chip ten-fold, which is critical as we continue to gain market share in the photovoltaic cell market."

Sam DiRenzo, Vice President, General Manager of Veeco's MOCVD Operations commented, "M-Com's selection of our TurboDisc E450 As/P MOCVD System is further evidence of its ability to produce consistently high yields of premium multi-junction solar cell devices. The E450 has the industry's highest throughput, which has made it the top-selling MOCVD tool for this application."

Veeco's TurboDisc E450 (and its recently introduced successor, the E475) As/P tools are engineered for the high-volume production of compound semiconductor materials, and offer a level of process control and reliability unmatched by competing MOCVD technologies. With integrated RealTemp(R) 200 technology for direct closed loop in-situ wafer temperature control, and fast gas switching for strict control of interface abruptness, these technically advanced systems provide superior material quality and process efficiency. In addition to triple junction solar cells, applications include HBTs, pHEMTs, red, orange and yellow HB-LEDs, and laser diodes.

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