NOVA Launches HelioSense100 Standalone Optical CD system for 3D Wafer Fabrication

Nova Measuring Instruments, a leading innovator and key provider of metrology solutions for advanced process control used in semiconductor manufacturing, announced today the launch of its new standalone Optical CD system, the HelioSense100^TM, targeted at the most complex device manufacturing across the semiconductor segments.

Multiple HelioSense100^TM systems were ordered already in the last few months and are in use by leading customers worldwide. The company expects to recognize initial revenues for this system within the third quarter of 2015.

With its unique optical technology, combining high precision, superior accuracy and new channels of information, the HelioSense100TM is a state of the art metrology platform that addresses well the most challenging requirements arising from the industry's technological transitions in the next years to come. The HelioSense100^TM supports the industry transition to multi-patterning small pitch manufacturing and 3D vertical devices by offering a wide range of metrology measurements that drive tighter process control for the most critical parameters in Logic, Flash and DRAM.

The HelioSense100^TM system is enhanced by Nova's modeling solutions, as part of the latest NovaMARS modeling software, and Nova's newly introduced high performance computation solution, allowing customers to adopt the new system in early R&D stages and effectively utilize it all the way to later stages of high-volume manufacturing and device maturity.

"As a leading metrology innovator for advanced process control, we are committed to maintaining our technological lead by introducing new breakthrough solutions that will assist our customers in their growing technology challenges and contribute to their long term success," stated Eitan Oppenhaim, Nova's President and CEO. "Across all industry segments our customers require advanced metrology systems that can control complex process parameters in the most advanced nodes. The HelioSense100TM is exactly this tool, featuring state-of-the-art technology that combines multiple innovations, pushing the metrology technical envelope even further. The multiple orders and installations we have so far are a vote of confidence in the newly introduced technology, and we are excited from its market adoption so far."

Source: http://www.novameasuring.com/