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Energetiq Unveils New LED Illuminator for Lithography Applications

Manufacturer of advanced light sources, Energetiq Technology, has expanded its light source product portfolio with the introduction of a new LED Illuminator designed for semiconductor lithography. The LED Illuminator was showcased at SPIE Advanced Lithography 2010 in San Jose, California.

LED Illuminator

The LED Illuminator offers an estimated operating life of 20,000 h and provides uniform illumination. The illuminator has an instant on/off function and can be operated without using a shutter. The device is available in either 365/405/440 nm (i/h/g-line) or 365 nm (i-line) versions.

The Chief Executive Officer of Energetiq Technology, Paul Blackborow, stated that the LED Illuminator is specifically designed to generate optimum power and brightness required for current lithographic applications. The LED Illuminator delivers improved performance through superior uniformity control. The company’s advanced cooling technique and light engine deliver a compact design that removes the need for optics, filters and mechanical shutters, thus minimizing system footprint and complexity, Blackborow said.

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