Article - 15 Oct 2007
THis article discusses the differences between dye, fiber hosted, semiconductor, solid-state and free electron lasers.
News - 3 Sep 2008
Cymer, Inc., the market's leading developer of light sources used to create advanced semiconductor chips, has unveiled the XLR 500d-an argon fluoride (ArF) laser light source for 32 nanometer (nm)...
News - 29 Apr 2008
Cymer, Inc., the world's leading supplier of light sources used in semiconductor lithography, announced today the company has installed its XLR 500i light source at IMEC, a leading research center...
Article - 10 May 2013
The argon fluoride (ArF) laser is an excimer laser that consists of a mixture of noble gas such as xenon, krypton or argon and a halogen gas such as chlorine or fluorine, which when subjected to high...
News - 27 Apr 2010
Gigaphoton Inc., a major lithography light source manufacturer for the global semiconductor industry, today announced that an extreme ultraviolet (EUV) light source developed by the technology...
News - 29 Sep 2014
Gigaphoton Inc., a major lithography light source manufacturer, announced today that it has completed development of an electricity-reduction technology for its flagship “GT Series” of...