Jul 21 2007
The new COMPexPro 1000 excimer laser combines the economy of a mid-sized laser platform with the high repetition rate and long lifetime previously available only from high-end products.
Based on Coherent's field-proven COMPexPro platform, this laser delivers a proven tube lifetime of 10 billion pulses for either ArF or KrF operation. COMPexPro 1000 also features pulse energies between 10 and 20 mJ, as well as superior pulse-to-pulse energy stability.
With its long tube lifetime, the COMPexPro 1000 provides a significantly lower cost of ownership than any other excimer laser in its class. This low cost of ownership is particularly beneficial for continuously running (24/7) applications that can easily consume several billion pulses per year. The laser also features a long pulse duration to reduce peak power, thus maximizing the lifetime of beam delivery optics and further reducing the total cost of ownership.
The 1 kHz repetition rate enables increased process speed for a number of micromachining, drilling, direct write and inspection applications, such as drilling ink jet nozzles and inspecting semiconductor photomasks. With actively stabilized output in the 10- to 20-watt power range, the COMPexPro 1000 represents a particularly cost-effective tool for these applications. Overall, it is ideal for both job shops and pre-production process development.
http://www.coherent.com/