SPIE Recognizes Marc Himel for Achievements in Micro-Optics

SPIE will honor 62 new Fellows of the Society this year. Fellows are members of distinction who have made significant scientific and technical contributions in the multidisciplinary fields of optics, photonics, and imaging.

They are honored for their technical achievement, for their service to the general optics community, and to SPIE in particular. More than 800 SPIE members have become Fellows since the Society’s inception in 1955.

"The annual recognition of Fellows provides an opportunity for us to acknowledge Members for their outstanding technical contributions and service to SPIE," says Ralph James, SPIE President.

Marc Himel, Tessera, United States, for achievements in micro-optics for advanced lithography systems.

Himel’s contributions to optical engineering include pioneering work in metrology, diffractive optics, thin films, and the design, manufacture, and testing of optical and extreme ultraviolet (EUVL) projection lithography systems. His advances in this arena are particularly noteworthy, especially the advances in ring-field optics for EUVL and diffractive components in customized illumination systems for deep ultraviolet step-and-scan lithographic systems.

His work extends beyond the technology itself and into the greater optics and local communities. Himel has developed exhibits for the Orlando Science Center, coordinated a National Institute of Standards and Technology workshop on projection lithography for EUVL-based systems, and has reached out to area youth as science fair judge and career panel member.

Himel’s dedication to SPIE is just as noteworthy, having contributed to the Society in a wide breadth of ways. He served on the program committee for the Micromachining Technology for Micro-Optics conference, conducted an SPIE Student Leadership Workshop on Values at Work at the SPIE Optics + Photonics symposium, serves on the SPIE Membership Committee, judged the 2008 and 2009 Prism Awards for Photonic Innovation, and has participated in the SPIE Congressional Visit Day, among several other roles.

Source: http://www.tessera.com/


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