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Opto Diode Introduces Low-Noise, Extreme Ultraviolet (EUV) Photodetector

New SXUV series photodiode features a large 20 mm² circular active area for measuring ultraviolet light and power monitoring of Extreme UV lasers.

Opto Diode Corporation, an ITW company, announces the SXUV20C, a low-noise, extreme ultraviolet (EUV) photodetector that features a large 20 mm² circular active area.  The new device has superior responsivity in the 1nm to 200 nm wavelength region.

It is specially designed to be stable over long periods of time when exposed to high intensity EUV energy.

The 20 mm² circular active area provides a substantial surface for easy alignment to the EUV laser.  The SXUV20C offers superior hardness in extreme UV environments while providing lower noise than the previously released SXUV20HS1 device.

The new photodetector joins Opto Diode’s family of SXUV photodiodes with varying active area sizes to meet your most critical measurements, speed, and power monitoring performance objectives.

Additional features include high photon flux robustness, minimum shunt resistance of 50 MΩ, reverse breakdown voltage (typical) VR: 1R = 1µa 10 volts, and typical capacitance of C: VR = 0V 3nF.

The low-noise EUV photodetector is housed in an industry-standard TO-8 package for easy integration into most UV laser systems. Operating and storage temperatures range from -20 °C to +80 °C and from -20 °C to +100 °C respectively.

For more information on Opto Diode’s SXUV20C photodiode or for volume pricing quotes, please contact: [email protected].

Opto Diode Corporation (Camarillo, CA - www.optodiode.com), an ITW Company, delivers industry-leading sensors, photodiodes, IR detectors, photonic modules, assemblies, and LEDs. Available in standard and custom designs, Opto Diode products have earned a reputation for high performance, superior quality and reliability for over 30 years. Opto Diode offers advanced performance sensors from the extreme ultraviolet (UV) to the mid-infrared (mid-IR). Our products provide unparalleled high-energy particle, electron, X-ray, and UV detection along with superior sensitivity to discriminate trace gases or detect heat, sparks, or flames in the mid-IR spectrum.  Other products include high performance LEDs with radiometric emissions from 365 to 940 nm and IR emitters covering 1 to 10 microns.

Opto Diode serves a variety of industries including aerospace, automotive, biotechnology, food processing, medical, military/defense, industrial, semiconductor equipment manufacturing, and test & measurement.  Our manufacturing process is in a cleanroom environment, from start to finish.  Opto Diode’s domestic U.S. facility is optimized for design and manufacturing with an on-site wafer fabrication, class 1,000 to class 10,000 clean rooms, extensive assembly capabilities and packaging expertise.  From prototyping to high-volume production, we manufacture wafers-to-components then package and assemble photonic modules-to-optoelectronic sub-systems. For more information, visit www.optodiode.com.      

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