SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor and related markets, today announced the launch of a new UV-LED lamp house for use in its first exposure tools, which have a leading position in the market for more than fifty years.
SUSS MicroTec strives to bring sustainability and economic thinking in line with ecological aspects. With the development and implementation of the environmentally low impact UV-LED lamp house concept for Mask Aligner, SUSS MicroTec has taken a further important step in terms of resource conservation and environmental protection.
The new UV-LED light source has a much longer life than conventional mercury vapor lamps. Moreover, it no longer needs warm-up and cool-down - the LED light source is only switched on during the actual exposure process. Both factors contribute to low energy consumption. In terms of health, safety and environmental protection, the LED technology provides a significantly improved solution. Finally, the use of LED lighting in lithography provides for maximum flexibility in process design. It is therefore an ideal addition to the SUSS Mask Aligner MO Exposure Optics which ensures optimal exposure results.
"The new LED lamp house features the latest in technology and thus meets the growing demand for environmental sustainability and energy efficiency.", says Dr. Per-Ove Hansson, CEO of SUSS MicroTec. "By combining leading edge innovations with our environmental strategy we not only create cost benefits for our customers but also protect the environment."