The new ZPS™ system from ZYGO provides high-precision non-contact absolute position measurement on up to 64 synchronized channels.
The ZPS™ system is used to measure absolute position using ultra-compact optical sensors. These sensors can be easily integrated into high-precision applications such as deformable mirrors and lens positioning.
The optical sensor system offers high-precision, non-contact, absolute position measurement on up to 64 synchronized channels spanning a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.
The optical sensors do not produce heat and are insensitive to electromagnetic interference. This makes the ZPS system suitable for high-precision applications that can be affected by the aforementioned factors. The ultra-compact sensors connect to the compact centralized enclosure through fiber optic cables.
All electronics for the absolute position measurement system are housed in this rack-mountable enclosure.
The ZPS system is usually used in closed-loop feedback systems that require a nonstop stream of high-precision data from multiple sensors in order to compensate for drift and maintain precise alignment and positioning. The system can also be used as a tool in manufacturing environments and RD&E to quantify dynamic mechanical performance or for alignment in test fixtures.
Precision Stage Control
The key features of the ZPS system are as follows:
- Non-contact optical measurement
- Scalable, up to 64 channels
- Repeatable absolute position measurement (≤ 0.5 nm, 3 σ)
- Ultra-compact sensors with no heat generation or EMI sensitivity
- Reliable telecom-proven fiber optic components
- High-precision system by using proprietary compensation algorithms
ZYGO offers everything you need to integrate the ZPS system into your application, including fiber optic cables, sensor mounts, and user interface software.