Posted in | Profilometers

ZeGage™ Pro: 3D Optical Profiler System

To ensure quality control and process monitoring in an industrial environment, ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers offer non-contact measurement and characterization of micro- and nano-scale features of many types of surfaces.

Benchtop-class industrial non-contact surface profilers are measured by performance, ease of use, flexibility, and precision. Industry-leading ZeGage Pro-series sets the benchmark in these areas. The ZeGage Pro, based on ZYGO's own CSI technology, offers cutting-edge technologies to enable accurate, dependable, straightforward, and confident surface metrology.

Component Finder, Smart Setup, and SureScan™ technology for vibration-resilient metrology and simplified component setup and optimized measurements are examples of exclusive capabilities. Measuring a wide range of surfaces and parts quickly and easily has never been easier.

Powerful Performance

  • SureScan™ technology improves proprietary non-contact measurement technology for low vibration sensitivity and convenient deployment around facilities.
  • Superior gage capacity is provided by quantitative surface metrology with nanometer-level precision.
  • A high-resolution image sensor with 1.9 million pixels offers quick areal measurements in seconds, resulting in superior surface detail and visualization.
  • Field stitching and fully automated measurement processes allow for high-resolution assessment of huge regions. (Optional motorized component stage required.)  


  • Capable of measuring a broad range of surface materials and characteristics, such as surface roughness, shape, step height, and more, in both 2D and 3D profiles.
  • The Mx software offers extensive capabilities for reporting, analyzing, and visualizing surface data.
  • Increase the investment measurement range with optional software modules for Cognex VisionPro® 2D analysis and film topography profiling, objective turrets, manual and motorized sample stages, and more.

Productivity and Value

  • By automating component finding, light setting, and scan configuration, Smart Setup technology shortens part changeover times and decreases training time. After the sample is placed under the objective, Smart Setup often produces a first data map in less than one minute.
  • Reasonably priced in relation to performance, especially compared to other systems such as mechanical contact stylus profilers.
  • Since the procedure is non-contact, there is no need to bother about replacing consumables.
  • SureScan™ technology, compact and resilient to vibrations, facilitates seamless integration into any part of your facility. 

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