Non-Destructive and Non-Contact Optical Measurements on Substrates - SE-1000

Semilab’s SE-1000 spectroscopic ellipsometer provides high measurement performance and delivers modularity in a compact tabletop footprint.

This cost-effective tool enables manual sample positioning and is equipped with a manual goniometer, suitable for research and development laboratories.

The SE-1000 performs non-contact and non-destructive optical measurements on substrates and both single-layer and multi-layer samples to analyze the optical and thickness properties of individual thin films.

The SE-1000 tool is equipped with Semilab’s sophisticated smart electronics with replaceable parts and functions, with the latest operating and analysis software (SAM/SEA). The system can be operated using a PC or laptop via a new touch panel interface, or via LAN network.

Measurement Modes

  • Jones matrix
  • Polarimetry
  • Porosimetry: Measurements of porosity and pore size distribution in thin films
  • Mueller matrix 11 coefficients
  • Spectroscopic ellipsometry with rotating compensator
  • Generalized ellipsometry for anisotropic samples
  • In situ measurement mode for real-time control during etch or deposition process

Options

  • Microspot
  • Visualization camera
  • Spectroscopic reflectometer
  • Liquid cell and cooling and heating stages
  • Near-infrared spectral extension
  • Atmospheric thin-film porosimetry

Manual XY stage. SE-1000

Manual XY stage.

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