Posted in | Optics and Photonics

Nova's New Hybrid Metrology Concept Combines Optical and X-Ray Technologies

Nova Measuring Instruments, a leading innovator and a key provider of metrology solutions for advanced process control used in semiconductor manufacturing, announced today a new hybrid metrology concept, which combines measurements from two of its leading metrology platforms - X-Ray and Optical.

With this newly introduced solution, thin film and material parameters (measured on X-Ray metrology platforms) are combined with profile and geometry parameters (measured on Optical CD metrology platforms) for better process control in the most advanced technology nodes. This unique offering utilizes the synergy between the technologies, resulting in superior metrology performance that supports tighter process control schemes for faster time to market. The new hybrid solution relies on Nova's novel optical and X-Ray modeling algorithms and is being evaluated by several key customers.

"We are excited to introduce this new hybrid concept to our key customers and expand our holistic metrology portfolio," said Dr. Shay Wolfling, Nova's CTO. "The unique synergy between our Optical and X-Ray technologies delivers the most advanced metrology portfolio, which addresses the increasing process control challenges arising from the most advanced technology nodes. This new hybrid method follows our previously introduced hybrid solutions, to combine several metrology techniques, and represents Nova's continuous leadership in developing holistic metrology, which is enhancing our core technology for better process control."

About Nova: Nova Measuring Instruments delivers continuous innovation by providing advanced metrology solutions for the semiconductor manufacturing industry. Deployed with the world's largest integrated-circuit manufacturers, Nova's products deliver state-of-the-art, high-performance metrology solutions for effective process control throughout the semiconductor fabrication lifecycle. Nova's product portfolio, which combines high-precision hardware and cutting-edge software, supports the development and production of the most advanced devices in today's high-end semiconductor market. Nova's technical innovation and market leadership enable customers to improve process performance, enhance products' yields and accelerate time to market. Nova acts as a partner to semiconductor manufacturers from its offices around the world. Additional information may be found at


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