Engineering High-Precision Motion Systems for Complex Applications

MKS Newport is a trusted supplier of OEM solutions to semiconductor capital equipment manufacturers and leading tier one manufacturers. Its growing OEM division is known for accuracy, compact design, and excellent reliability, making its products essential to semiconductor development.

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Every Project Matters

MKS Newport’s OEM approach is engineered to provide clients with a competitive edge by offering direct access to the company’s broad expertise in engineering, production, logistics, and service. The company dives deep into analyzing every product, subassembly, or subsystem from multiple angles to perform a quick and holistic feasibility review.

Through this initial assessment, MKS Newport clearly defines the significant value it can bring to client projects, leveraging core technologies and strengths to guarantee success.

Applications

• Wafer and mask inspection
• Laser micromachining
• Lithography
• Laser annealing
• Hybrid bonding
• Silicon photonics
• Tomography
• Flow cytometry
• Test and metrology

Total Design and Production Control

MKS Newport’s OEM project leaders adhere to a structured procedure to manage client projects. Complete bills of materials (BOMs) are developed and managed through the company’s formal engineering change order (ECO) process, with full documentation of all assembly and evaluation processes.

The Optimum in Quality Control

Operating under the registered quality system ISO 9001, MKS Newport’s quality system is independently audited, with routine internal audits conducted to ensure compliance. The company focuses on integrating quality into its workflows and monitors performance through closed-loop metrics.

Image Credit: MKS Newport

Image Credit: MKS Newport

Market-Leading Systems Solutions Custom Solutions to Address Unique Challenges

MKS is a globally recognized leader in cutting-edge technology products and solutions for fields such as semiconductors, laser micromachining, advanced automation, photonics, and life and health sciences.

In-Depth Design and Development

MKS Newport’s motion team specializes in all aspects of high-precision systems, from design and production to on-site installation. With more than five centuries of combined experience in multi-axis motion component design, the company understands specific client requirements through applications engineering, project management, and operational excellence.

MKS Newport has deployed more than 2000 instruments worldwide, many of which operate 24/7 in the semiconductor sector, especially in wafer inspection and lithography. The company’s capabilities also include flat panel display (FPD) inspection and laser scribing for thin-film photovoltaic panels and LED production.

Markets Served

• Semiconductors and microelectronics
• PCB manufacturing
• Industrial metrology and manufacturing
• Flat panel display
• Aerospace and defense
• Silicon photonics
• Industrial micromachining
• Life and health sciences
• Research

Image Credit: MKS Newport

Engineered Systems

MKS Newport offers a wide range of standard motion products and OEM building blocks, as well as custom motion systems customized to specific application requirements. The company’s engineering team focuses on high-precision solutions for both research and industrial users.

Whether clients need a modified standard product, a simple subassembly, or an intricate multi-axis system, MKS Newport is the ideal partner. The company conducts feasibility studies, recommends optimal solutions, and provides continuous support throughout the system’s lifespan, backed by comprehensive evaluations during production and on-site assessments.

MKS Newport typically offers four levels of tailored motion systems:

Special Coating: Hexapod with black anodization. Image Credit: MKS Newport

RVU240: Vacuum, high torque, high stiffness, high resolution rotary stage. Image Credit: MKS Newport

1. Customized Standard Products

MKS Newport’s standard products can be tailored in multiple ways to meet different criteria, including cable length, connectors, lubrication, high load design, high resolution, or high spring strength. The custom product engineering team will address special client requirements with the highest efficiency

2. Tailored Products for Specific Environments

For years, MKS Newport’s product engineering team has been engineering and producing special motion devices for niche applications, including high-energy laser fusion systems and synchrotrons. Additional examples include high-class clean-room-compatible, vacuum-compatible, non-magnetic, or extended-temperature-range customization of standard products.

Image Credit: MKS Newport

Image Credit: MKS Newport

MKS Newport has delivered a number of solutions to research, semiconductor, military, and aerospace clients seeking the best combination of ultra-high precision motion and environmental preparation.

Preparation for these types of demanding settings requires an in-depth understanding of materials science, as each specification level will guide its own set of allowable materials.

The company typically modifies its standard products while accounting for the compatibility of grease or lubricants, cable insulators, motors, electronics (limit or origin switches), hardware (material and purge holes), surface finishes (no anodization), and materials (porosity).

Accompanying these special material considerations are production processes and facilities specifically designed to guarantee optimal product performance.

Environmental Preparations

MKS Newport’s extensive product lines and vast experience make the company an ideal collaborator for applications that need unique environmental preparation. The company understands the small yet important details that are necessary to operate in the following unique environments:

• Clean room
• High- or low-temperature environments
• EUV (extreme ultraviolet)
• Non-magnetic and high energy
• Vacuum: 10^-3 hPa (7.5 x 10^-4 Torr)
• High vacuum: 10^-6 hPa (7.5 x 10^-7 Torr)
• Ultra-high vacuum: 10^-9 hPa (7.5 x 10^-10 Torr)

3. Customized Systems with Limited Engineering

MKS Newport offers economical solutions made from its standard catalog components. The company optimizes its performance to address client requirements and conduct metrology checks prior to delivery to ensure adherence to global standards.

Sensor calibration bench for car safety systems in the automotive industry. Image Credit: MKS Newport

Azimuth/elevation gimbal with 350 mm diameter for LIDAR analysis, target tracking, or optical sensor testing. Image Credit: MKS Newport

X-Y-theta assembly built enitely by standard products. Image Credit: MKS Newport

Medium-complexity assembly built with standard products with minimal custom engineering. Image Credit: MKS Newport

Image Credit: MKS Newport

Image Credit: MKS Newport

4. Advanced Integrated Platforms

MKS Newport draws on its decades of experience in motion solutions to partner with clients and develop tailored OEM technology platforms for specific applications.

These platforms have been successfully adopted alongside OEM partners in the semiconductor sector, especially in wafer inspection and lithography applications. Other applications include flat-panel display (FPD) inspection and processing, as well as laser scribing of thin-film photovoltaic panels.

To support the client’s product development process, MKS Newport engages in early collaborative discussions to identify needs and solutions, ensuring that the optimum platform is agreed upon. Collaboration continues throughout the implementation of the motion platform into the client’s final product.

Metrology

Metrology and Acceptance Test

Extensive metrology capabilities and resources are used to assess and measure critical system requirements, ensuring excellence in quality, accuracy, and performance. The best available metrology instruments are employed to deliver real performance data to clients.

Five Levels of Metrology

Depending on client requirements, the Newport technical team can propose five distinct and complementary metrology levels with a tailored motion solution. The company will provide calibration data with their advanced products, explicitly stating the promised specifications.

Metrology Instruments

• Interferometers
• Autocollimators
• Modal test systems
• Environmental chambers
• High-precision encoders with optical grid
• Temperature-controlled metrology room
• Instantaneous acquisition
• Vibration-isolated platform
• Compliance assessments (ESD test bench)

Image Credit: MKS Newport

Newport is a brand within the MKS Instruments Photonics Solutions division. The Newport product suite contains a full range of solutions, including precision motion control, optical tables and vibration isolation systems, photonic instruments, optics, and opto-mechanical parts.

By leveraging core expertise in vibration isolation and submicron positioning systems as well as opto-mechanical and photonics subsystems, MKS’ cutting-edge Newport solutions improve client capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, research, and defense industries.

This information has been sourced, reviewed, and adapted from materials provided by MKS Newport.

For more information on this source, please visit MKS Newport.