How Air-Bearing Stages Enable High-Performance Motion Control

MKS is a globally recognized leader in state-of-the-art technology products and solutions for industries such as semiconductors, advanced automation, photonics, and life and health sciences.

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From systems design to production to on-site installation, MKS’ motion team is completely autonomous, with a focus on developing high-precision systems that match optimally individual client requirements. The MKS team has experience in high-precision, multi-axis motion part design and production, collectively spanning half a millennium.

The company provides an in-depth understanding of client requirements through applications engineering, design, project management, and production, supporting client operation excellence (sales, CSR, operations, and service).

MKS has over 2000 field-deployed instruments installed in facilities worldwide, with many operating in 24/7 environments in the semiconductor sector for wafer inspection and lithography applications.

Additional applications include flat panel display (FPD) inspection and processing, laser scribing of thin-film photovoltaic panels, and various laser scribing applications related to LED production.

Markets

Newport’s custom solutions serve a range of uses:

  • Semiconductors and microelectronics
  • Industrial metrology and manufacturing
  • Aerospace and defense
  • Life and health sciences
  • Research

Applications

  • Wafer and mask inspection
  • Lithography
  • Hybrid bonding
  • Laser annealing
  • Positioning
  • Test and metrology
  • Inspections
  • Advanced packaging
  • Laser micromachining

Technologies

  • Cleanliness and vacuum preparation
  • Planar air bearing
  • Goniometric stages
  • Ceramic structures (SiC)
  • Integrated motion control
  • Rotary stages
  • High-load actuators
  • Linear stages

OEM: Developing for the Future

MKS’s dedicated OEM group concentrates solely on the unique needs of OEM clients. This experienced, professional department was developed as a small international group within a large company, thus offering the best of both worlds. Drawing upon the resources of a large company yields the individualized service and fast response of a small company.

Client Projects Matter

MKS’s OEM approach is to provide clients with a competitive advantage in their markets by offering direct access to expert resources across engineering, production, logistics, and service organizations. The company thoroughly analyzes a product, subassembly, or subsystem from all angles to conduct a fast and detailed feasibility review.

During this initial evaluation procedure, MKS determines the value it can add according to its core technologies and competencies. The company works with clients at every stage, with a team spanning engineering, production, logistics, marketing, and customer service to provide maximum support.

MKS sees this team as an essential component of their clients’ organization that reports directly to the project team.

Discretion at All Times

MKS views client program confidentiality as imperative and makes special provisions to ensure that the highest levels of confidentiality are maintained. Non-disclosure agreements are signed up front before beginning technical discussions and establishing design ownership issues.

Upon request, Newport will dedicate work cells for applications to ensure complete confidentiality within the company, allowing for client peace of mind.

Full Design and Manufacturing Control

Newport’s OEM project leaders manage client projects using controlled procedures. Complete BOMs are developed and controlled via the company’s formalized ECO process, with all assembly and test procedures totally and formally documented.

The Optimum in Quality Control

Newport's quality system, which operates under an ISO 9001-registered quality system, is audited by a third party. As further proof of its commitment to quality, the company carries out routine internal audits to ensure compliance with its procedures.

Newport guarantees that quality is integral to the process, monitoring it via closed-loop performance metrics.

A Foundation of Support

Newport has a global infrastructure to ensure that post-sales service and support extends on-site, at client facilities, or at the client’s customers’ facilities. The company’s ability to create solutions has no borders or time restrictions. Cooperative service agreements and extended warranties for specific support levels are available.

Newport’s factory-trained technicians bring test equipment and spare components on-site to service their systems. Metrics can be established to track product service history.

Corrective Actions

Newport has established closed-loop corrective-action systems, should things not go as expected. Complaints are entered into the customer management database and made directly accessible to the executive staff. This information is then reviewed for immediate corrective action. After the root cause and course of corrective action have been determined, this information is provided to the client in writing.

This information has been sourced, reviewed, and adapted from materials provided by MKS Newport.

For more information on this source, please visit MKS Newport.

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