Bruker’s ContourX-1000 white light interferometry (WLI) system features advanced hardware and software for fully automated 3D surface texture and roughness measurements.
The one-click Advanced Find Surface™ tool (featuring auto-focus and auto-illumination) eliminates the need for manual surface registration, improving both usability and measurement speed.
With its self-adapting USI measurement mode and streamlined VisionXpress™ interface, ContourX-1000 ensures reliable, high-precision measurements on any surface, by any user, even in fast-paced, multi-user production environments.
Only the ContourX-1000:
- Fast, flexible production-floor metrology with tip/tilt head, dual light sources, and advanced automation
- High accuracy and reliability through self-calibrating laser and built-in vibration isolation
- User-friendly measurement and analysis with guided workflows and recipe-driven software
High-aspect-ratio MEMS structure. Image Credit: Bruker Nano Surfaces and Metrology
High-density bump interconnect. Image Credit: Bruker Nano Surfaces and Metrology
Stitched measurement of a bifocal contact lens showing form. Image Credit: Bruker Nano Surfaces and Metrology
Technical polymer film. Image Credit: Bruker Nano Surfaces and Metrology
Embodying the Power and Versatility of Non-Contact Surface Metrology
Culmination of Latest Optical Profiling Hardware Advances
The ContourX-1000 integrates Bruker’s patented tip/tilt head, dual-LED light source, automated turret and stages, and a range of wafer chuck options. These features support fast configuration and optimization for various production and R&D applications, including challenging surfaces and deep features.
Benchmark for Accuracy and Robustness
Background: IC chip topography with overlay of automated optical inspection (AOI) image Foreground: 1 μm periodic polymer grating. Image Credit: Bruker Nano Surfaces and Metrology
In addition to Bruker’s exclusive interferometry capabilities, the ContourX-1000 includes an internal laser reference and integrated vibration isolation. This combination ensures system stability, consistent tool-to-tool performance, and gage-capable metrology—even in environments with significant external noise.
Paragon of Powerful Automated Measurement and Analysis
Automation graphical user interface (GUI) with wafer map. Image Credit: Bruker Nano Surfaces and Metrology
The Universal Scanning Interferometry (USI) mode automatically adjusts measurement settings to maintain nanometer-level resolution across height ranges of several microns. The VisionXpress interface is designed to separate measurement quality from operator experience, enabling consistent results.
Advanced Find Surface activates auto-focus and illumination adjustments to help users in multi-user environments obtain reliable measurements.
The ContourX-1000 supports software packages including SureVision, Multi-Region Analysis, Vision64 Map™, and Film Measurement to meet specific application needs.
ContourX-1000 Specifications
Source: Bruker Nano Surfaces and Metrology
| . |
. |
| Measurement Modes |
PSI, USI, VSI, Optional Film |
| Max. Scan Range |
≤10 mm |
| Vertical Resolution1 |
<0.01 nm |
| Lateral Resolution |
0.38 μm minimum (Sparrow criterion);
0.13 μm (with AcuityXR®) |
| Step Height Accuracy2 |
<0.75 % |
| Step Height Repeatability |
<0.125 % 1 sigma repeatability |
| Max. Scan |
≤122 μm/sec (with laser reference) |
| Sample Reflectivity |
0.05 % to 100 % |
| Max. Sample Slope |
≤40 ° (shiny surfaces);
≤87 ° (rough surfaces) |
| Sample Height |
≤100 mm |
| Sample Weight |
≤45 kg |
| XY Sample Stage |
300 mm automated (0.5 μm encoders); Integrated vibration isolation table |
| Z Focusing |
100 mm automated |
| Tip/Tilt Function |
±5 ° automated in head |
| Optical Metrology Module |
Patented dual-LED illumination |
| Objectives |
Parfocal: 2.5X, 5X, 10X, 20X, 50X, 100X, 115X; LWD: 1X, 2X, 5X, 10X;
TTM: 2X, 5X, 10X, 20X; Bright Field: 2.5X, 5X, 10X, 50X
Single-objective adapter; Optional motorized five-position turret |
| Available Zoom Lenses |
0.55X, 0.75X, 1X 1.5X, 2X auto-sensing modules |
| Camera |
5 MP monochrome with 1200 x 1000 data array; Optional color camera |
| Software System |
Vision64® and VisionXpress on Windows 10 LTS 64-bit OS |
| Software Packages |
AcuityXR; Advanced PSI; Automatic Pattern Alignment; MATLAB; Multiple Region Analysis;
Optical Microlens Analysis; Production Mode; SDK; TCP/IP; SureVision; Vision64 Map |
| Reporting Languages |
English; German; French; Italian; Spanish; Japanese; Chinese; Polish; Korean; Brazilian Portuguese; Russian |
| Automation |
Auto-focus; Auto-intensity; Auto-saving; Auto-stitching;
On-fly analysis; Scattered and grid automation; Recording in database |
| Calibration |
Via NIST/PTB traceable step height and lateral ruler standards;
Optional auto and continuous internal laser signal |
| System Footprint |
852 mm x 793 mm x 1608 mm (W x D x H) |
| Weight |
493 kg |
| Warranty |
12 months |
| Certification |
CE-Certification; ANSI B46.1 compliant |
1 As demonstrated by taking the one sigma Sq value of 30 PSI repeatability measurements on an SiC reference mirror.
2 Absolute accuracy for step heights 8 μm and higher.