Backed by 55 years of expertise in surface metrology, the Dektak Pro™ establishes a new benchmark for stylus profilometer performance, combining top-tier data quality with intuitive operation.
As the 11th generation of the Dektak® family, this system delivers:
- Industry-leading accuracy with repeatability better than 4 Å
- Faster measurement and analysis workflows
- A comprehensive set of Bruker-exclusive features for enhanced usability and versatility
Dektak Pro is the only system to offer the latest advancements in stylus profilometry alongside the long-term reliability required for both advanced research and demanding industrial environments.
The Most Advanced Stylus Profiler Ever | Bruker Dektak Pro
Video Credit: Bruker Nano Surfaces and Metrology
Industry-Leading Measurement and Analysis
Delivers consistently accurate and precise results.
Unique Direct-Drive Scan Stage and Software
Speeds up workflows and shortens time to results.
Streamlined Software and Tip Exchange
Provides exceptional flexibility and ease of use.
Features
Still Driving Stylus Profiling Innovation 55+ Years Later
For more than five decades, Bruker’s Dektak systems have pioneered advances in stylus profiling, driving improvements in resolution, stability, speed, and overall versatility. Today, Dektak is firmly recognized as the benchmark in stylus profilometry, trusted wherever precision and reliability are essential.
Dektak Pro represents the next step in stylus profiling, offering improved operability, measurement accuracy, and reliability, further strengthening the qualities that have long made Dektak synonymous with stylus profiling.
Maximizing Repeatability and Accuracy
Dektak Pro reliably provides unbeatable performance. Image Credit: Bruker Nano Surfaces and Metrology
Dektak Pro delivers highly accurate, precise measurements with industry-leading resolution, a low noise floor, and the most user-friendly tip exchange among commercial stylus profilometers. Advanced measurement and analysis capabilities enable repeatability better than 4 Å and reliable single-nanometer step height measurements.
Enhancing Throughput
Previous- Generation Dektak. Image Credit: Bruker Nano Surfaces and Metrology
Dektak Pro. Image Credit: Bruker Nano Surfaces and Metrology
Dektak Pro speeds up the entire measurement and analysis workflow. The direct-drive scan stage minimizes delays between scans, and 64-bit parallel processing in Vision64® software ensures fast data handling.
Several enhancements contribute to improved speed and usability:
- A new focusing algorithm brings nearly the full field of view into focus in the optical live image, making it easier to identify key features.
- Updated step height algorithms automate analysis routines, improve consistency, and reduce the chance of user error during step height measurements.
Providing Ultimate Versatility and Ease of Use
Suited to Widely Diverse Applications
Image Credit: Bruker Nano Surfaces and Metrology
Dektak Pro supports both current and emerging needs in R&D, process development, and QA/QC across a wide range of research and industrial applications, including:
- Biomaterials
- Microelectronics
- Thick film coatings
Accurate and Responsive in Dynamic Measurement Scenarios
1 μm step at 0.03 mg and 1 mm step at 15 mg, both measured using a single sensor on Dektak Pro. Image Credit: Bruker Nano Surfaces and Metrology
With Dektak Pro, a single measurement head covers 5 nm to 1 mm step heights and 0.03 to 15 mg loads (with the N-Lite+ option) without requiring recalibration. The low-inertia sensor (LIS 3) quickly responds to sudden changes in surface topography while maintaining accuracy in dynamic measurement scenarios.
Fast and Easy Stylus Replacement
Dektak Pro features the fastest and easiest tip exchange, making tip switching simple to address the widest range of applications. Image Credit: Bruker Nano Surfaces and Metrology
Dektak Pro’s self-aligning stylus assembly enables fast, straightforward stylus changes while minimizing the risk of handling errors. Bruker offers one of the broadest selections of stylus sizes to support a wide range of application needs.
Selecting the Configuration that Best Matches the Application and Budget
Image Credit: Bruker Nano Surfaces and Metrology
Dektak Pro is available in several standard configurations with different stage sizes (providing up to 200 mm of full-sample access for wafers) and includes automated stage options to match specific application needs and budget.
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Dektak Pro E or -S: Manual 100 mm XY stage with or without manual theta rotation
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Dektak Pro A: Automated 150 mm XY stage with automated 360° theta rotation
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Dektak Pro A200: Automated, encoded 200 mm XY stage with fine encoded 360° automated theta rotation
Specifications
Key Specifications
The listed product specifications and options are a starting point for discussions with our experts on how we can best address your specific needs and challenges.
Source: Bruker Nano Surfaces and Metrology
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| Measurement Technique |
Stylus profilometry (contact measurement) |
| Measurement Capability |
Two-dimensional surface profile measurements;
Optional three-dimensional measurement/analyses |
| Sample Viewing |
Digital magnification, 0.275 to 2.2 mm vertical FOV |
| Stylus Sensor |
Low Inertia Sensor (LIS 3) |
| Stylus Force |
1 to 15 mg with LIS 3 sensor;
0.03 to 15 mg range with optional N-Lite+ |
| Low Force Option |
N-Lite+ Low Force with 0.03 to 15 mg (optional) |
| Stylus Options |
Stylus radius options from 50 nm to 25 μm;
High Aspect Ratio (HAR) tips 200 μm x 20 μm;
Custom tips available upon request |
| Sample Stage X/Y |
Manual 100 mm (4 in.) X/Y, manual leveling;
Motorized 150 mm (6 in.) X/Y, manual leveling;
Motorized encoded 200 mm (8in.) X/Y |
| Sample R-Theta Stage |
Manual, continuous 360 degrees;
Motorized, continuous 360 degrees |