The M-2000 line of spectroscopic ellipsometers is engineered to meet the diverse
demands of thin film characterization. An advanced optical design, wide spectral
range, and fast data acquisition make it an extremely powerful and versatile
The M-2000 delivers both speed and accuracy. Our patented RCE technology combines
Rotating Compensator Ellipsometry with high-speed CCD detection to collect data
from the entire spectrum (hundreds of wavelengths) in a fraction of a second
with a wide array of configurations.
The M-2000 is the first ellipsometer truly to excel at everything from in-situ
monitoring and process control to large-area uniformity mapping and general
purpose thin film characterization.
Why an M-2000?
- Advanced Ellipsometer Technology
The M-2000 utilizes our patented RCE (rotating compensator ellipsometer)
technology to achieve high accuracy and precision.
- Fast Spectral Detection
The RCE design is compatible with advanced CCD detection to measure
ALL wavelengths simultaneously.
- Wide Spectral Range
This ellipsometer collects over 700 wavelengths from the ultraviolet
to the near-infrared – simultaneously.
- Flexible System Integration
With modular optical design, the M-2000 can be attached directly
to your process chamber or configured on any of our table-top bases.
Advanced design ensures accurate ellipsometry measurements for any