Spectroscopic Reflectometer and Film Thickness Measurement System SR300 from Angstrom Sun Technologies

The SR300 Spectroscopic Reflectometer & Film Thickness Measurement System can be used to measure the film thickness, refractive index, reflection, transmission and absorption spectra of thinf films and coatings.

Features

Features of the SR300 Spectroscopic Reflectometer & Film Thickness Measurement System are as follows:

  • Easy to set up
  • Easy to operate with Window based software
  • Advanced optics design for best system performance
  • Array based detector system to ensure fast measurement
  • Uniquely designed light source for better intensity stability
  • There are four ways to adjust light intensity:
    • Power output adjustment by knob from power supply
    • Insert a filter into filter slot at light output exit port
    • Beam size adjustment
    • Integration time adjustment in Detector from TFProbe software
  • Measure film thickness and Refractive Index up to 5 layers
  • Allow to acquire reflection, transmission and absorption spectra in milliseconds
  • Capable to be used for real time or in-line thickness, refractive index monitoring
  • System comes with comprehensive optical constants database and library
  • Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
  • Upgradeable to MSP (Microspectrophotometer) system, SRM Mapping system, Multiple channel system, Large Spot for direct measurement over patterned or featured structure
  • Apply to many different type of substrates with different thickness
  • Various accessories available for special configurations such as running measurement over the curve surface
  • 2D and 3D output graphics and user friendly data management interface

Applications

The SR300 Spectroscopic Reflectometer & Film Thickness Measurement System is suited to use in:

  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap…..)
  • Forensics, Biological films and materials
  • Inks, Mineralogy, Pigments, Toners
  • Pharmaceuticals, Medial Devices
  • Optical coatings, TiO2, SiO2, Ta2O5…..
  • Semiconductor compounds
  • Functional films in MEMS/MOEMS
  • Amorphous, nano and crystalline Si

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