Spectroscopic Reflectometer and Film Thickness Measurement System SR300 from Angstrom Sun Technologies

The SR300 Spectroscopic Reflectometer & Film Thickness Measurement System can be used to measure the film thickness, refractive index, reflection, transmission and absorption spectra of thinf films and coatings.


Features of the SR300 Spectroscopic Reflectometer & Film Thickness Measurement System are as follows:

  • Easy to set up
  • Easy to operate with Window based software
  • Advanced optics design for best system performance
  • Array based detector system to ensure fast measurement
  • Uniquely designed light source for better intensity stability
  • There are four ways to adjust light intensity:
    • Power output adjustment by knob from power supply
    • Insert a filter into filter slot at light output exit port
    • Beam size adjustment
    • Integration time adjustment in Detector from TFProbe software
  • Measure film thickness and Refractive Index up to 5 layers
  • Allow to acquire reflection, transmission and absorption spectra in milliseconds
  • Capable to be used for real time or in-line thickness, refractive index monitoring
  • System comes with comprehensive optical constants database and library
  • Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
  • Upgradeable to MSP (Microspectrophotometer) system, SRM Mapping system, Multiple channel system, Large Spot for direct measurement over patterned or featured structure
  • Apply to many different type of substrates with different thickness
  • Various accessories available for special configurations such as running measurement over the curve surface
  • 2D and 3D output graphics and user friendly data management interface


The SR300 Spectroscopic Reflectometer & Film Thickness Measurement System is suited to use in:

  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap…..)
  • Forensics, Biological films and materials
  • Inks, Mineralogy, Pigments, Toners
  • Pharmaceuticals, Medial Devices
  • Optical coatings, TiO2, SiO2, Ta2O5…..
  • Semiconductor compounds
  • Functional films in MEMS/MOEMS
  • Amorphous, nano and crystalline Si

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