Carl Zeiss has unveiled a newly developed advanced system that integrates the highly efficient AURIGA CrossBeam (FIB-SEM) workstation with a pulsed micro-focus laser. This new, advanced offering from Zeiss called AURIGA Laser, is used for sample analysis, wherein the target structure is submerged in material layers.
The removal of the materials surrounding the target structure with mechanical ablation and cross-sectioning damages the sample, hampering further examination. Hence, ablation with a pulsed micro-focus laser beam will be the ideal approach.
A nanosecond pulsed scanning laser is used in this solution. This diode-pumped solid-state laser can be operated at 355 nm by Germany-based TRUMPF AG. In tandem with Carl Zeiss, the researchers at Fraunhofer-Institute for Non-destructive Testing have standardized this innovative tool to have fast transfer procedures, instant relocation of the region of interest on the sample, and simplified operation.
The system is equipped with an independent chamber for laser operation, in order to prevent the debris from entering the AURIGA FIB-SEM workstation and detectors during the process. The process begins with preparation of the structure under study with the laser, which is then followed by quick and consistent transfer of sample to the main chamber, under vacuum conditions for FIB polishing or SEM examination. The laser is equipped with a CAD software, capable of controlling the scanner head. The user can therefore predict the complicated patterns of the sample structure, prior to the process. AURIGA Laser is the first system on the market with the above operation features.
Future applications of AURIGA includes semiconductor manufacturing, preparation of microsystems or geological samples, production of photovoltaics, polymer electronics, joining and contacting technologies, oil and gas prospection, and researches in geomechanical consulting, pharmaceuticals, life sciences.