The NewView™ 8000 series of 3D optical surface profilers from ZYGO offer robust versatility in non-contact optical surface profiling. They are designed to perform rapid, nondestructive measurements and do not require any sample preparation. Advanced software tools are used to calculate critical dimensions/step heights, and characterize and quantify surface roughness and other topographical features with exceptional precision and accuracy.
Profile heights can differ from < 1 nm to 20000 µm, at high speeds, irrespective of surface texture, magnification, or feature height.
The NewView™ 8000 series of profilers use ZYGO's patented technology for Coherence Scanning Interferometry (CSI) to easily measure many surface types, including smooth, flat, stepped, rough, and sloped.
Performance, Value, and Versatility
The NewView™ 8000 profilers are available in two configurations: a single zoom NewView™ 8200 configuration and a triple zoom equipped NewView™ 8300 system.
Regardless of the model chosen, all NewView™ 8000 systems offer easy usage, high-accuracy measurements, and have a wide range of applications at a cost-effective price, making the systems the ideal choice for versatility and value in 3D optical profilers.
Advanced Analysis and Control Software
The NewView™ 8000 series uses all-new Mx™ software for complete system control and data analysis, including smart measurement navigation, rich interactive 3D maps, quantitative topography information, pass/fail limits, integrated SPC with statistics, and control charting.
- Flexible analysis - a broad range of data views, filters, and quantitative results are included
- Smart user interface with a workflow-based design makes it simple to learn and use
- Interactive 3D plots - rotate, zoom, pan, and update results in real-time
- Integrated SPC analysis tools monitor pass-fail criteria, process statistics, and track results
Other application modules for specific requirements, such as 2D vision analysis and measurement in the presence of transparent films, are available for customers who require these skills.

Mx Software Screen

NewView 8000 Series Optical Profiling System
Flexible Configurations
The NewView™ 8000 profilers include an open work region, with distinct lines of sight, to help create changeovers and measurement setups fast and simple. Systems can be provided with a number of sample stages, ranging from completely manual X/Y and tilt stages, to fully automatic stages with 150 mm of travel and 4 degrees of tilt.
The compact size and integrated isolation system makes the systems ideal for benchtop installations, and the optional stand and workstation make them a suitable production-style system.

The open work area features clear lines of sight
Key Features
The key features of the NewView™ 8000 series of 3D optical surface profiler are as follows:
- Leading-edge precision and gage capability
- Quick non-contact measurements
- Improved optical imaging
- Sub-angstrom precision
- Excellent 3D surface visualization
- Two models to choose from: single zoom or triple zoom
Overview of ZYGO NewView™ 9000 Non-Contact Optical Profiling System