Posted in | Profilometers

Non-Contact Surface Measurement with the ZeGage Plus 3D Optical Surface Profiler

ZYGO’s ZeGage Plus is a 3D optical surface profiler possessing sub-nanometer precision. It builds upon the capabilities of the ZeGage profiler with quicker measurement speed, better precision, and a better range of measurable surfaces, while maintaining its ease of use, vibration insensitivity, and small footprint.

The ZeGage Plus optical profiler measures a wider range of surfaces from super smooth to very rough, with sub-nanometer precision and independent field of view. Surface finishes on materials such as glass, ceramic and metal may include ground, honed, polished, lapped, and super-polished.

For high-speed measurements, the ZeGage Plus is capable of scanning up to twice as fast as the ZeGage, providing better throughput and quicker time-to-data for production metrology.

As with the ZeGage profiler, the Mx™ interactive control software provides simple and detailed visualization to help users control their process.

Powerful Performance

  • Superior gage capability with sub-nanometer precision and quantitative surface metrology
  • Proprietary non-contact measurement technology has low sensitivity to vibration effects, which eliminates the need for vibration isolation platforms in several applications
  • High-resolution one million pixel image sensor offers fast areal measurements in seconds, for excellent visualization and surface detail
  • Correlates to both 3D and 2D standards, and complies with surface roughness parameters of ISO 25178
  • Integrated focus and autofocus aid simplify part setup and reduce operator variability
  • Field stitching and totally-automated measurement sequences allow high resolution inspection of large areas (optional motorized part stage is required)


  • Measures a wide range of surface materials and finishes, from super smooth to rough, such as steep slopes and large steps
  • Part damage is prevented with the non-contact metrology technique
  • 2D and 3D profiling of surface texture, form, step-height, and more
  • Included Mx software offers detailed tools for analysis, visualization, and reporting of surface data
  • Selectable field-of-view and magnification with a number of imaging and system options
  • Area-based measurement is not sensitive to part lay

Productivity and Value

  • Compact, vibration-tolerant SureScan™ technology enables easy integration anywhere in the user’s facility
  • Cost-effective price-to-performance ratio compares well to alternative systems, such as mechanical contact stylus profilers
  • Simplified operation results in low service and training costs
  • Non-contact method means that there are no consumable replacement costs to be apprehensive about
  • Consumables are not needed for measurements
  • High-output, durable LED light source for years of trouble-free operation

Key Features

The key features of the ZeGage Plus are as follows:

  • Up to 2X quicker vertical scan rate compared to standard ZeGage
  • Vibration-resistant, for process control, and production floor metrology measures almost all surfaces ranging from super-smooth to rough
  • Over 20X better surface topography repeatability when compared with standard ZeGage

Mx Software Screen

Mx Software Screen

ZYGO's ZeGage™ Optical Profiler Measures Precision Surfaces of Implantable Medical Devices

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