ZYGO’s Nexview 3D optical surface profiler is capable of measuring topography of almost any surface, from rough to smooth with sub-nanometer accuracy, independent of field of view.
Measurement types comprise of thin films, steep slopes, flatness, roughness, and large segments and steps with feature heights ranging from < 1 nm up to 20000 µm.
The Nexview profiler has the potential to measure a super polished optical surface comprising of sub-Angstrom surface roughness, to steep machined angles up to 85 degrees. This profiler offers the best qualities of other profiling technologies such as stylus, focus scanning and confocal, without their shortcomings. Users will no longer have to choose a profiler based on the type of surface they plan to measure.
The all-new Mx™ software is also used by the Nexview profiler. This new software powers system control and data analysis such as rich interactive 3D maps, quantitative topography information, control charting, pass/fail limits, intuitive measurement navigation and built in SPC with statistics.
The main features of the Nexview™ 3D optical surface profiler are as follows:
- Intuitive user interface
- Streamlined design
- No-compromise profiling
- Gage capable performance
- Automated operation
- Vibration tolerance technology
- 3D and non-contact measurement
- All new graphical workflow software
- ISO 25178 surface measurement parameters
- All new analysis and control software
Overview of ZYGO Nexview™ NX2 Non-Contact Optical Profiling System